No. 6,252,473 issued Jun. 26, 2001 and assigned to Hughes Electronics Corporation. This patent describes a waveguide switch using bulk mechanical actuators. USRE43699E1 - Reconfigurable scanner and RFID system using the… Specifically, the release of electromagnetic antenna signals from antenna 400 depends upon the annular plasma shield 420 being positioned at either one wavelength or greater from the antenna 400, or at distances equal to the wavenumber … US4185213A - Gaseous electrode for MHD generator - Google… The plasma plume is injected into the MHD generator's main channel thereby forming a gaseous electrode. The electrode is oriented in the main channel opposed by at least a second electrode which may be of the same or a different …
Simulations of the Plasma Structure of a Radial Line Slotted Antenna Plasma Source JUN YOSHIKAWA, Tokyo Electron Technology Devel-opment Institute — The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a...
FIG. 3 a illustrates conceptually the method the invention uses to mitigate the antenna blockage problem discussed with reference to FIG. 1 a. The antenna originally used on the aircraft 1 is replaced with a Artificial Impedance Surface … Broadband Metamaterials in Electromagnetics | Metamaterial… Broadband Metamaterials in Electromagnetics - Ebook download as PDF File (.pdf), Text File (.txt) or read book online. Metamaterials are artificial electromagnetic or optical media whose bulk (macroscopic) properties are controlled by … icrf antenna development: Topics by WorldWideScience.org The frequency of the RF source can be feedback controlled to compensate for changes in the edge plasma conditions, or fast variable tuning elements in the transmission line between the generator output and the antenna input connections can … APS/URSI 2017 | 2017 IEEE International Symposium on Antennas…
Report "Low-cost monopulse radial line slot antenna - …
Linearly polarized arrays are also provided by changing slot array arrangement. The feeding structures are given by a coaxial probe and cavity resonators, which is presented in detail. The applications of radial line slot antennas are satellite communication antenna, plasma etching, and high power use. This chapter also describes these ... Radial Line Slot Antennas | Request PDF A radial line slot antenna (RLSA) is a nonresonant multimode waveguide slotted array. To improve the power handing capacity, we design a radial line slow wave structure which replaces a ... Near field distributions in radial line slot antennas for ... Abstract: The near field distributions in radial line slot antennas (RLSA) for surface wave coupled plasma (SWP) are examined. The RLSA are suitable for uniform, high density and large-area plasma generation. In order to realize higher productivity, quick evacuation of reaction gas a narrow gap process space is highly required. Characteristics of large-diameter plasma using a radial ...
Linearly polarized arrays are also provided by changing slot array arrangement. The feeding structures are given by a coaxial probe and cavity resonators, which is presented in detail. The applications of radial line slot antennas are satellite communication antenna, plasma etching, and high power use. This chapter also describes these ...
Abstract: The plasma reactor with radial line slot antenna (RLSATM), a planar microwave (2.45 GHz) plasma source, is used in etch and deposition technology, typically in reactive rich gaseous environment, and for processes that are sensitive to plasma damage. Besides a strict uniformity control, the plasma chemistry is Radial Line Slot Antennas - Home - Springer Radial Line Slot Antennas Hiroyuki Arai* Yokohama National University, Yokohama, Kanagawa, Japan Abstract This chapter presents the development history of radial line slot antenna. The antennas are used for circular polarized high-gain antenna in microwave and millimeter wave bands. Linearly polarized arrays Impact of static magnetic fields on the radial line slot ... The radial line slot antenna plasma source is used in semiconductor device fabrication. As is the case for all plasma sources, ever more strict uniformity control requirements are driven by the precision demands of new device technologies. Radial Line Slot Antennas | Request PDF A radial line slot antenna (RLSA) is a nonresonant multimode waveguide slotted array. To improve the power handing capacity, we design a radial line slow wave structure which replaces a ...
Our research themes are planar slotted waveguide antennas and electromagnetic theory. ... Plasma Etching. ... collaboration with TOKYO ELECTRON (TEL) SSPS * *SSPS: Space Solar Power System. A Radial Line Slot Antenna Fed by a Rectangular Waveguide through a Crossed Slot (5.8GHz, 23dBi, 300W) collaboration with IHI and Kyoto University.
the slots of the antenna. The spillover efficiency is maximiz ed during the design process. The antenna is centrally fed by a simple coaxial probe. The antenna design is validated by a prototype and measurements at 12.5 GHz. Index Terms—Near field, focusing, radial line slot array, RLSA, near-field shaping. I. INTRODUCTION
Jan 27, 2015 ... A compact concentric array radial line slot antenna (CA-RLSA) operating at ... Published in: IEEE Transactions on Plasma Science ( Volume: 43 ... Design of a Concentric Array Radial Line Slot Antenna for ... - NSFC IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 43, NO. 10, OCTOBER 2015. 3527. Design of a Concentric Array Radial Line Slot. Antenna for High- Power ...